Modeling and design of a planar 3-axis MEMS rate gyro

Author

Roland, I. ; Masson, S. ; Ducloux, O. ; Le Traon, O. ; Isac, Nathalie ; Bosseboeuf, Alain

Author_Institution

DMPH, Onera - The French Aerosp. Lab., Châtillon, France

fYear

2011

fDate

28-31 Oct. 2011

Firstpage

530

Lastpage

533

Abstract

This paper deals with the design and fabrication of a 3-axis Coriolis Vibrating micro Gyro (μCVG), based on a single planar monolithic structure. The presented μCVG design ensures a high mechanical coupling between one single driving mode and each one of the 3 sensing modes when the structure is subjected to Coriolis acceleration, with limited mechanical cross-coupling between vibration modes. The structure is made of a semi-conducting material with a cubic lattice, such as Silicon (Si) or Gallium Arsenide (GaAs). GaAs was particularly investigated for its piezoelectric properties, allowing both the actuation and the detection of the mechanical vibrations.

Keywords

III-V semiconductors; elemental semiconductors; gallium arsenide; microfabrication; microsensors; piezoelectric materials; silicon; vibrations; 3-axis μCVG; 3-axis Coriolis vibrating micro gyro; Coriolis acceleration; GaAs; Si; cubic lattice; mechanical coupling; mechanical cross-coupling; mechanical vibration; piezoelectric property; planar 3-axis MEMS rate gyro; semiconducting material; single planar monolithic structure; Couplings; Gallium arsenide; Optical resonators; Resonant frequency; Sensors; Silicon; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2011 IEEE

Conference_Location

Limerick

ISSN

1930-0395

Print_ISBN

978-1-4244-9290-9

Type

conf

DOI

10.1109/ICSENS.2011.6127265

Filename

6127265