• DocumentCode
    2972162
  • Title

    Physical and electrical characteristics of low-temperature annealed spin coated zinc oxide thin films on Teflon substrates

  • Author

    Sauki, Nur Sa´adah Muhamad ; Rahim, Muhammad Hazman Rafie Abdul ; Herman, Sukreen Hana ; Mahmood, Mohamad Rusop

  • Author_Institution
    NANO-Electron. Centre, Univ. Teknol. MARA, Shah Alam, Malaysia
  • fYear
    2012
  • fDate
    24-27 June 2012
  • Firstpage
    479
  • Lastpage
    500
  • Abstract
    The structural, and electrical properties of ZnO thin films deposited by sol-gel spin coating technique, onto polytetrafluoroethylene (Teflon) and glass substrates have been investigated. 0.4M sol were prepared by using Zinc acetate dehydrate as precursor, monoethanolamine as stabilizer and 2-methoxyethanol as solvent. The thin films were annealed at 200°C, 250°C and 300°C. This annealing process was performed in every layer. Electrical characterization shows the conductivity of the films deposited onto Teflon substrates that annealed at 200°C, 250°C and 300°C were around 0.176, 0.0988, and 0.0952 S cm-1 respectively. On the other hand, for the thin films deposited on glass substrates, these values are 0.187, 0.139 and 0.126 S cm-1 for similar variation in the annealing temperature. The conductivity of the ZnO thin films on glass substrate was higher than those on Teflon substrates. FESEM images confirmed that microstructure of the thin films on both substrate consists of nanoparticles.
  • Keywords
    II-VI semiconductors; annealing; crystal microstructure; electrical conductivity; field emission electron microscopy; nanofabrication; nanoparticles; scanning electron microscopy; semiconductor growth; semiconductor thin films; sol-gel processing; spin coating; wide band gap semiconductors; zinc compounds; 2-methoxyethanol; FESEM; SiO2; ZnO; electrical characteristics; electrical conductivity; glass substrates; low-temperature annealed spin coated zinc oxide thin films; microstructure; monoethanolamine; nanoparticles; physical characteristics; polytetrafluoroethylene substrates; sol-gel spin coating technique; structural properties; teflon substrates; temperature 200 degC; temperature 250 degC; temperature 300 degC; zinc acetate dehydrate; Annealing; Conductivity; Films; Glass; Substrates; Zinc oxide; Electrical Properties; Sol-gel Spin Coating; Structural Properties; ZnO Thin Films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Humanities, Science and Engineering Research (SHUSER), 2012 IEEE Symposium on
  • Conference_Location
    Kuala Lumpur
  • Print_ISBN
    978-1-4673-1311-7
  • Type

    conf

  • DOI
    10.1109/SHUSER.2012.6268824
  • Filename
    6268824