DocumentCode
2972162
Title
Physical and electrical characteristics of low-temperature annealed spin coated zinc oxide thin films on Teflon substrates
Author
Sauki, Nur Sa´adah Muhamad ; Rahim, Muhammad Hazman Rafie Abdul ; Herman, Sukreen Hana ; Mahmood, Mohamad Rusop
Author_Institution
NANO-Electron. Centre, Univ. Teknol. MARA, Shah Alam, Malaysia
fYear
2012
fDate
24-27 June 2012
Firstpage
479
Lastpage
500
Abstract
The structural, and electrical properties of ZnO thin films deposited by sol-gel spin coating technique, onto polytetrafluoroethylene (Teflon) and glass substrates have been investigated. 0.4M sol were prepared by using Zinc acetate dehydrate as precursor, monoethanolamine as stabilizer and 2-methoxyethanol as solvent. The thin films were annealed at 200°C, 250°C and 300°C. This annealing process was performed in every layer. Electrical characterization shows the conductivity of the films deposited onto Teflon substrates that annealed at 200°C, 250°C and 300°C were around 0.176, 0.0988, and 0.0952 S cm-1 respectively. On the other hand, for the thin films deposited on glass substrates, these values are 0.187, 0.139 and 0.126 S cm-1 for similar variation in the annealing temperature. The conductivity of the ZnO thin films on glass substrate was higher than those on Teflon substrates. FESEM images confirmed that microstructure of the thin films on both substrate consists of nanoparticles.
Keywords
II-VI semiconductors; annealing; crystal microstructure; electrical conductivity; field emission electron microscopy; nanofabrication; nanoparticles; scanning electron microscopy; semiconductor growth; semiconductor thin films; sol-gel processing; spin coating; wide band gap semiconductors; zinc compounds; 2-methoxyethanol; FESEM; SiO2; ZnO; electrical characteristics; electrical conductivity; glass substrates; low-temperature annealed spin coated zinc oxide thin films; microstructure; monoethanolamine; nanoparticles; physical characteristics; polytetrafluoroethylene substrates; sol-gel spin coating technique; structural properties; teflon substrates; temperature 200 degC; temperature 250 degC; temperature 300 degC; zinc acetate dehydrate; Annealing; Conductivity; Films; Glass; Substrates; Zinc oxide; Electrical Properties; Sol-gel Spin Coating; Structural Properties; ZnO Thin Films;
fLanguage
English
Publisher
ieee
Conference_Titel
Humanities, Science and Engineering Research (SHUSER), 2012 IEEE Symposium on
Conference_Location
Kuala Lumpur
Print_ISBN
978-1-4673-1311-7
Type
conf
DOI
10.1109/SHUSER.2012.6268824
Filename
6268824
Link To Document