• DocumentCode
    2972279
  • Title

    Properties of a room temperature terahertz detection array

  • Author

    Klaassen, T.O. ; Adam, A.J.L. ; Kasalynas, I. ; Hovenier, J.N. ; Pandraud, G. ; Iordanov, V.P. ; Sarro, P.M.

  • Author_Institution
    Kavli Inst. of NanoScience Delft, Delft Univ. of Technol., Netherlands
  • Volume
    2
  • fYear
    2005
  • fDate
    19-23 Sept. 2005
  • Firstpage
    467
  • Abstract
    An 8×8 pixel array has been designed and fabricated for broadband THz detection. Each pixel consists of a 500×500 μm thin film absorber on a SiN membrane with thermopile temperature readout. The expected performances - NEP = 4.10-9 W/Hz12/ and 10 ms response time - were compared with test results.
  • Keywords
    silicon compounds; submillimetre wave detectors; thermopiles; thin film devices; 10 ms; SiN; broadband terahertz detection; terahertz detection array; thermopile temperature readout; thin film absorber; Absorption; Biomembranes; CMOS technology; Detectors; Instruments; Materials science and technology; Pyroelectricity; Semiconductor films; Silicon compounds; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Infrared and Millimeter Waves and 13th International Conference on Terahertz Electronics, 2005. IRMMW-THz 2005. The Joint 30th International Conference on
  • Print_ISBN
    0-7803-9348-1
  • Type

    conf

  • DOI
    10.1109/ICIMW.2005.1572615
  • Filename
    1572615
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2972279