Design and realization for high dynamic silicon micromachined gyroscope

This paper reports a design and realization method for the high dynamic silicon micromachined gyroscope. The gyroscope is used in control technology field to measure pose of a rotating carrier with high self-rolling velocity up to 14400deg/s. The roll angular velocity, the yawing and pitching angle velocity of the rotating carrier are sensed and outputted by the gyroscope, and the output signal of the gyroscope can be obtained by the signal processing technology which is consisted of hardware circuits, software arithmetic and compensation technique.