Resonance Technique for Accurate On-Wafer Characterization of Ferroelectric Varactors

Author

Deleniv, Anatoli ; Gevorgian, S. ; Sherman, V. ; Yamada, T. ; Setter, N.

Author_Institution

Chalmers Univ. of Technol., Gothenburg

fYear

2007

fDate

3-8 June 2007

Firstpage

2063

Lastpage

2066

Abstract

A resonance technique for on-wafer characterization of ferroelectric varactors at microwave frequencies is proposed and experimentally verified. The approach is targeted on accurate assessment of the varactors losses if traditional approaches using planar transmission lines can not be used. A number of varactors based on 0.55 um thick BSTO film are measured using the proposed approach and results are compared to those obtained with the broadband reflection type measurement. It is demonstrated that the resonance technique is more accurate and reliable.

Keywords

barium compounds; ferroelectric capacitors; ferroelectric thin films; microwave devices; strontium compounds; varactors; (BaSr)TiO₃; BSTO film; ferroelectric varactors; microwave frequencies; on-wafer characterization; planar transmission lines; resonance technique; size 0.55 mum; Ferroelectric films; Ferroelectric materials; Microwave frequencies; Optical films; Planar transmission lines; Propagation losses; Resonance; Thickness measurement; Transmission line measurements; Varactors; ferroelectric capacitors; resonators;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium, 2007. IEEE/MTT-S International

Conference_Location

Honolulu, HI

ISSN

0149-645X

Print_ISBN

1-4244-0688-9

Electronic_ISBN

0149-645X

Type

conf

DOI

10.1109/MWSYM.2007.380292

Filename

4264274