DocumentCode
2975050
Title
Electrostatic MEMS emulsifying device with high flow rate
Author
Jeong, Jinwoo ; Chun, Kukjin
Author_Institution
Sch. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., Seoul, South Korea
fYear
2011
fDate
28-31 Oct. 2011
Firstpage
1185
Lastpage
1188
Abstract
Electrostatically actuated MEMS emulsifying device with high flow rate has been proposed in this paper. In order to increase flow rate, electrostatic actuation across working fluid is adopted. Also large number of nozzle array is used for active droplet injection. Design of emulsifying device is optimized using FEM simulation for flow rate of 12.5 mL/min. The proposed device is fabricated and packaged. Total size of MEMS emulsifying device is 21.6 mm × 21.6 mm × 1.2mm.
Keywords
electrostatic actuators; micromechanical devices; nozzles; active droplet injection; electrostatic MEMS emulsifying device; electrostatic actuation; high flow rate; nozzle array; Electrodes; Electrostatics; Fluids; Force; Fuels; Micromechanical devices; Valves;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2011 IEEE
Conference_Location
Limerick
ISSN
1930-0395
Print_ISBN
978-1-4244-9290-9
Type
conf
DOI
10.1109/ICSENS.2011.6127418
Filename
6127418
Link To Document