DocumentCode
2977735
Title
Monolithic Ceramic Technology for Sensing Devices
Author
Ramos, Francisco M. ; López-Gándara, Carlos ; Cirera, Albert ; Morante, Joan R.
Author_Institution
L´´Hospitalet de Llobregat, Llobregat
fYear
2009
fDate
11-13 Feb. 2009
Firstpage
293
Lastpage
296
Abstract
We present a multilayer co-fired ceramic technology for the development of alumina-based gas sensors substrates. These substrates include embedded heater and thermo-resistance as well as electrodes in a 2times2 mm dice. Substrate thickness is less than 0.2 mm. The substrate technology allows obtaining smooth surface at the nanometer scale. As an example of application, we have studied the growth of nanowires on the presented structure to take advantage of nanoscale phenomena.
Keywords
alumina; ceramics; electrodes; gas sensors; micromechanical devices; nanowires; substrates; alumina-based gas sensors substrate; electrode; embedded heater; monolithic ceramic technology; multilayer cofired ceramic technology; nanometer scale; nanoscale phenomena; nanowire; sensing device; substrate thickness; thermo-resistance; Ceramics; Costs; Electrodes; Energy consumption; Gas detectors; Nanowires; Nonhomogeneous media; Shape; Silicon; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices, 2009. CDE 2009. Spanish Conference on
Conference_Location
Santiago de Compostela
Print_ISBN
978-1-4244-2838-0
Electronic_ISBN
978-1-4244-2839-7
Type
conf
DOI
10.1109/SCED.2009.4800489
Filename
4800489
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