DocumentCode
2978355
Title
Modified hard anodization procedure to fabricate hybrid nanoporous alumina
Author
Santos, A. ; Vojkuvka, L. ; Pallarés, J. ; Ferré-Borrull, J. ; Marsal, L.F.
Author_Institution
Dept. d´´Eng. Electron., Univ. Rovira i Virgili, Tarragona
fYear
2009
fDate
11-13 Feb. 2009
Firstpage
436
Lastpage
439
Abstract
In this work we present an innovative approach to fabricate new structures based on nanoporous alumina. The fabrication process is carried out following a modified two-step hard anodization process in a 0.3 M oxalic acid solution at 120 V and 0degC. The nanoporous anodic alumina membranes present a hybrid pore structure which consist of pores with short diameters inner pores with longer diameters. This new nanostructure could be used to develop new chemical or biological sensors or to fabricate optoelectronic and storage devices.
Keywords
alumina; membranes; nanoporous materials; Al2O3; hybrid pore structure; modified hard anodization; nanoporous anodic alumina membranes; oxalic acid solution; temperature 0 degC; two-step hard anodization process; voltage 120 V; Aluminum; Biomembranes; Biosensors; Chemical and biological sensors; Fabrication; Grain size; Nanobioscience; Nanoporous materials; Rough surfaces; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices, 2009. CDE 2009. Spanish Conference on
Conference_Location
Santiago de Compostela
Print_ISBN
978-1-4244-2838-0
Electronic_ISBN
978-1-4244-2839-7
Type
conf
DOI
10.1109/SCED.2009.4800527
Filename
4800527
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