• DocumentCode
    2978355
  • Title

    Modified hard anodization procedure to fabricate hybrid nanoporous alumina

  • Author

    Santos, A. ; Vojkuvka, L. ; Pallarés, J. ; Ferré-Borrull, J. ; Marsal, L.F.

  • Author_Institution
    Dept. d´´Eng. Electron., Univ. Rovira i Virgili, Tarragona
  • fYear
    2009
  • fDate
    11-13 Feb. 2009
  • Firstpage
    436
  • Lastpage
    439
  • Abstract
    In this work we present an innovative approach to fabricate new structures based on nanoporous alumina. The fabrication process is carried out following a modified two-step hard anodization process in a 0.3 M oxalic acid solution at 120 V and 0degC. The nanoporous anodic alumina membranes present a hybrid pore structure which consist of pores with short diameters inner pores with longer diameters. This new nanostructure could be used to develop new chemical or biological sensors or to fabricate optoelectronic and storage devices.
  • Keywords
    alumina; membranes; nanoporous materials; Al2O3; hybrid pore structure; modified hard anodization; nanoporous anodic alumina membranes; oxalic acid solution; temperature 0 degC; two-step hard anodization process; voltage 120 V; Aluminum; Biomembranes; Biosensors; Chemical and biological sensors; Fabrication; Grain size; Nanobioscience; Nanoporous materials; Rough surfaces; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices, 2009. CDE 2009. Spanish Conference on
  • Conference_Location
    Santiago de Compostela
  • Print_ISBN
    978-1-4244-2838-0
  • Electronic_ISBN
    978-1-4244-2839-7
  • Type

    conf

  • DOI
    10.1109/SCED.2009.4800527
  • Filename
    4800527