Self-Aligned n-channel MOSFET on InP and In0.53Ga0.47As Using Physical Vapor Deposition HfO2 and Silicon Interface Passivation Layer

Author

Ok, Injo ; Kim, H. ; Zhang, M. ; Zhu, F. ; Zhao, H. ; Park, S. ; Yum, J. ; Garcia, Domingo ; Majhi, Prashant ; Goel, N. ; Tsai, W. ; Gaspe, C.K. ; Santos, M.B. ; Lee, Jack C.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Texas, Austin, TX

fYear

2008

fDate

23-25 June 2008

Firstpage

91

Lastpage

92

Abstract

Research on high-k (HfO₂) materials has been expanded significantly. However, MOSFETs with high-k gate dielectrics on silicon still have several problems with relatively low mobility of high-k devices in thin EOT regime compared to the universal curve. In this work, as an alternative of silicon substrate, InP and In_0.53Ga_0.47As has been studied. W e present the material and electrical characteristics of TaN/HfO₂/InP self-aligned n-MOSFET with PVD Si interface Passivation layer (IPL) under various post deposition anneal (PDA) conditions. We also demonstrated N-channel high-k InP and In_0.53Ga_0.47As MOSFETs with good transistor behavior.

Keywords

III-V semiconductors; MOSFET; electric properties; passivation; substrates; vapour deposition; In_0.53Ga_0.47As; InP; PVD Si interface passivation layer; electrical characteristics; high-k devices; high-k gate dielectrics; high-k materials; low mobility; material characteristics; physical vapor deposition; post deposition anneal condition; self-aligned n-MOSFET; self-aligned n-channel MOSFET; silicon interface passivation layer; silicon substrate; thin EOT regime; universal curve; Atherosclerosis; Dielectric substrates; Electric variables; Hafnium oxide; High K dielectric materials; High-K gate dielectrics; Indium phosphide; MOSFET circuits; Passivation; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Device Research Conference, 2008

Conference_Location

Santa Barbara, CA

ISSN

1548-3770

Print_ISBN

978-1-4244-1942-5

Electronic_ISBN

1548-3770

Type

conf

DOI

10.1109/DRC.2008.4800749

Filename

4800749