DocumentCode
2989395
Title
2006 IEEE International Conference on Semiconductor Electronics
fYear
2006
fDate
Oct. 29 2006-Dec. 1 2006
Abstract
The following topics are dealt: MEMS; sensors; actuators; nanoelectronics; semiconductor devices; and integrated circuits.
Keywords
actuators; integrated circuit design; micromechanical devices; nanoelectronics; semiconductor devices; sensors; MEMS; actuator applications; integrated circuit design; nanoelectronics; semiconductor devices; sensor applications;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Electronics, 2006. ICSE '06. IEEE International Conference on
Conference_Location
Kuala Lumpur
Print_ISBN
0-7803-9730-4
Electronic_ISBN
0-7803-9731-2
Type
conf
DOI
10.1109/SMELEC.2006.380998
Filename
4266548
Link To Document