• DocumentCode
    2992912
  • Title

    Studies on the Effect of Laser Cooling in Atom Lithography for Nanometrology

  • Author

    Gong Wei-Gang ; Ma Yan ; Li Tong-Bao

  • Author_Institution
    Dept. of Phys., Tongji Univ., Shanghai, China
  • fYear
    2012
  • fDate
    21-23 May 2012
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    To meet the requirement of nanoscale dimensional metrology, lengthy standards with features below 100 nanometers are indispensable instruments. Our group has successfully fabricated length standards through atom lithography. For further improvement of the quality of these standards, laser cooling of Chromium atom beam was studied through a transverse Doppler cooling scheme. Moreover, utilizing the software developing kit (SDK) of CCD camera, we developed an image collecting software, which had functions of real-time display for gray-scale image and image measure. In our experimental setup, with the software, we could detect the laser induced fluorescence spots from marginal beams to monitor and analyze the effect of laser cooling.
  • Keywords
    CCD image sensors; laser cooling; lithography; optical sensors; optical variables measurement; CCD camera; SDK; atom lithography; chromium atom beam; gray-scale image; image collecting software; image measure; laser cooling; laser induced fluorescence spot detection; marginal beams; nanometrology; nanoscale dimensional metrology; real-time display; software developing kit; transverse Doppler cooling scheme; Atom lasers; Atomic beams; Cooling; Gray-scale; Laser beams; Measurement by laser beam; Software;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photonics and Optoelectronics (SOPO), 2012 Symposium on
  • Conference_Location
    Shanghai
  • ISSN
    2156-8464
  • Print_ISBN
    978-1-4577-0909-8
  • Type

    conf

  • DOI
    10.1109/SOPO.2012.6270455
  • Filename
    6270455