Design on the Level Control System with High-Precision for the Micro-motion Platform

The level control system by multi-point real-time detection is designed in this paper based on the fuzzy self-adjusting PID algorithm. It is applied in the non-probe near-field optical microscope. Capacitance-to-digital converter chip AD7746 is used to converted capacitance value which is proportional to the distance between code plate and platform into digital value in the micro-positioning platform. The system has the following advantages such as higher positioning precision, faster response and more stable performance. It can meet the need of the level control precision for micro-motion platform of the non-probe near-field optical microscope. The simulation result indicates that this system may enhance the positioning precision and working efficiency, it is an effective method to realize automatic control in the micro-motion platform. What is more, the control system is simple and practical.