DocumentCode
2994236
Title
Characterization of silicon die strength with application to die crack analysis
Author
Hu Guojun ; Luan Jing-en ; Baraton, X.
Author_Institution
STMicroelectronics, Singapore, Singapore
fYear
2008
fDate
4-6 Nov. 2008
Firstpage
1
Lastpage
7
Abstract
After encapsulation, thermo-mechanical deformation builds up within the electronic packages due to temperature coefficient of expansion mismatch between the respective materials within the package as it cools to room temperature. As the trends in semiconductor packages continue toward a decrease in overall package size and an increase in functionality and performance requirements, they bring challenges of processing, handling, and understanding smaller components and, in particular, thinner dies. One of the reliability problems, die crack, becomes more serious due to the larger die area compared with package size, thinner thickness and thermal mismatch between the respective materials within the package. Die strength can be adversely affected during various manufacturing processes, such as grinding and chipping. A realistic understanding of the significance of processing on die strength is gained through the study of the actual, processed component. This work try to find the simple test method for determination of die strength to improve the scatter and try to differentiate the factors that affect the variability of die strength, in order to find out the causes of the weakness of the die strength. The surface conditions (roughness) of the specimens are determined by atomic force microscopy (AFM) and correlated to failure strength. A practical example is presented here that die cracking analysis has been done for a chip array thin core BGA (CTBGA) during thermal cycling. The die stress is calculated based on the finite element analysis (FEA) of CTBGA and the FEA-predicted die stress is used to predict the die failure rate compared with the experiment results.
Keywords
atomic force microscopy; ball grid arrays; finite element analysis; surface roughness; thermomechanical treatment; AFM; CTBGA; Die strength; FEA; atomic force microscopy; chip array thin core BGA; die crack; die crack analysis; die cracking analysis; electronic packages; finite element analysis; manufacturing processes; package size; reliability problems; semiconductor packages; silicon die strength; surface roughness; temperature coefficient of expansion; thermal cycling; thermomechanical deformation; thinner dies; Atomic force microscopy; Electronic packaging thermal management; Encapsulation; Materials reliability; Semiconductor device packaging; Semiconductor materials; Silicon; Temperature; Thermal stresses; Thermomechanical processes;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Manufacturing Technology Symposium (IEMT), 2008 33rd IEEE/CPMT International
Conference_Location
Penang
ISSN
1089-8190
Print_ISBN
978-1-4244-3392-6
Electronic_ISBN
1089-8190
Type
conf
DOI
10.1109/IEMT.2008.5507873
Filename
5507873
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