Miniature crystalline quartz electronical structure

Author

Clayton, Larry D. ; EerNisse, Errol P. ; Ward, Roger W. ; Wiggins, Robert B.

Author_Institution

Quartztronics Inc., Salt Lake City, UT, USA

fYear

1989

fDate

20-22 Feb 1989

Firstpage

121

Lastpage

125

Abstract

The photolithographic and chemical milling techniques used in fabricating a variety of three-dimensional monocrystalline quartz microstructures are presented. The piezoelectric effect, which is the electromechanical phenomenon utilized in the various applications of quartz technology, is described. Examples of quartz resonators used in sensing applications are presented. These miniature quartz sensors are incorporated into transducer systems which measure pressure, temperature, force, and acceleration. Some of the analytical tools used to design miniature quartz devices are outlined

Keywords

accelerometers; crystal resonators; electric sensing devices; etching; photolithography; piezoelectric devices; pressure transducers; quartz; 3D monocrystalline microstructures; SiO₂; acceleration; chemical milling techniques; crystalline quartz; electronical structure; etching; fabrication; force; miniature quartz devices; photolithographic techniques; piezoelectric effect; pressure; quartz resonators; sensing applications; temperature; transducer systems; Chemical sensors; Chemical technology; Crystal microstructure; Crystallization; Electromechanical sensors; Force measurement; Milling; Piezoelectric effect; Temperature measurement; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1989, Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE

Conference_Location

Salt Lake City, UT

Type

conf

DOI

10.1109/MEMSYS.1989.77975

Filename

77975