Design of MOEM vibration sensor using optical microring resonator and microcantilever beam

MEMS have made a great impact on sensing applications meeting the recent requirement for miniaturization. In this paper we propose and analyze an optical MEMS vibration sensor which exploits the photoelastic property of integrated optical microring resonator due to vibration of microcantilever beam. The sensor so designed is directed for use in determining engine vibrations up to the range of 8600g. 2D simulation has been performed for a microring resonator design of ring radius 6μm and waveguide width 0.5μm. The designed microcantilever beam is of dimensions 800μm × 300μm × 10μm. For the designed MOEMS vibration sensor, a wavelength shift of 100pm and 200pm has been observed for a force of 100μN and 400μN respectively. The sensitivity of the designed vibration sensor is found to be 0.0274pm/g for 7302.19g.