• DocumentCode
    3007332
  • Title

    Oxidized Amorphous Silicon As Gate Insulator For Field Mussiun Cathode Arrays

  • Author

    Peters, D. ; Stephani, D.

  • Author_Institution
    Siemens AG
  • fYear
    1993
  • fDate
    12-15 Jul 1993
  • Firstpage
    119
  • Lastpage
    119
  • Keywords
    Adhesives; Amorphous silicon; Cathodes; Conductivity; Dielectric constant; Dielectric substrates; Dielectrics and electrical insulation; Inorganic materials; Oxidation; Research and development;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
  • Print_ISBN
    0-7803-0852-2
  • Type

    conf

  • DOI
    10.1109/IVMC.1993.700309
  • Filename
    700309
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3007332