Microelectromechanical devices for wireless communications

Author

Nguyen, Clark T C

Author_Institution

Center for Integrated Sensors & Circuits, Michigan Univ., Ann Arbor, MI, USA

fYear

1998

fDate

25-29 Jan 1998

Firstpage

1

Lastpage

7

Abstract

An overview of recent progress in the research and development of microelectromechanical devices for use in wireless communication sub-systems is presented. Among the specific devices described are tunable micromachined capacitors, integrated high-Q inductors, low loss micromechanical switches, and micro-scale vibrating mechanical resonators with Q´s in the tens of thousands. Specific applications are reviewed for each of these components with emphasis on methods for miniaturization and performance enhancement of existing and future wireless transceivers

Keywords

acoustic resonator filters; bulk acoustic wave devices; capacitors; inductors; micromechanical devices; micromechanical resonators; mobile radio; radiofrequency filters; reviews; switches; transceivers; RF filters; VCO; bulk acoustic resonators; integrated high-Q inductors; low loss micromechanical switches; micro-scale vibrating mechanical resonators; microelectromechanical devices; miniaturization; performance enhancement; tunable micromachined capacitors; wireless communication subsystems; wireless transceivers; CMOS technology; Capacitors; Frequency; Inductors; Microelectromechanical devices; Micromechanical devices; Resonator filters; Switches; Transceivers; Wireless communication;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on

Conference_Location

Heidelberg

ISSN

1084-6999

Print_ISBN

0-7803-4412-X

Type

conf

DOI

10.1109/MEMSYS.1998.659719

Filename

659719