Microfabrication and parallel operation of 5×5 2D AFM cantilever arrays for data storage and imaging

Author

Lutwyche, M. ; Andreoli, C. ; Binnig, G. ; Brugger, J. ; Drechsler, U. ; Haeberle, W. ; Rohrer, H. ; Rothuizen, H. ; Vettiger, P.

Author_Institution

Zurich Res. Lab., IBM Res. Div., Ruschlikon, Switzerland

fYear

1998

fDate

25-29 Jan 1998

Firstpage

8

Lastpage

11

Abstract

In this paper we report on the microfabrication of a 5×5 2D cantilever array and its successful application to parallel imaging. The 5×5 array with integrated force sensing and tip heating has been fabricated using a recently developed, all dry silicon backside etching process. The levers on the array have integrated piezoresistive sensing. The array is scanned in x and y directions using voice coil actuators. Three additional voice coil z actuators are used in a triangular arrangement to approach the sample with the array chip. The system is thus leveled in the same way as an air table. We report details of the array fabrication, the x-y scanning and approach system as well as images taken with the system

Keywords

atomic force microscopy; lithography; micromachining; nanotechnology; piezoresistive devices; sputter etching; 2D AFM cantilever arrays; RIE; all dry silicon backside etching; control system; data storage; feedforward signals; integrated force sensing; integrated piezoresistive sensing; microfabrication; micromachining; parallel imaging; parallel operation; patterning; tip heating; triangular arrangement; voice coil actuators; x-y scanning and approach system; Actuators; Atomic force microscopy; Coils; Dry etching; Fabrication; Lithography; Memory; Protection; Resists; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on

Conference_Location

Heidelberg

ISSN

1084-6999

Print_ISBN

0-7803-4412-X

Type

conf

DOI

10.1109/MEMSYS.1998.659720

Filename

659720