DocumentCode
3008919
Title
Microfabricated capillarity-driven stop valve and sample injector
Author
Man, P.E. ; Mastrangelo, C.H. ; Burns, M.A. ; Burke, T.
Author_Institution
Center for Integrated Sensors & Circuits, Michigan Univ., Ann Arbor, MI, USA
fYear
1998
fDate
25-29 Jan 1998
Firstpage
45
Lastpage
50
Abstract
This paper presents the design, fabrication, and testing of passive plastic microfluidic valves and active injectors driven by capillary forces. The passive valves stop the flow of a liquid inside a capillary using a capillary pressure barrier that develops when the channel cross section changes abruptly. Two types of valves with vertical and horizontal neck regions were fabricated yielding pressure barriers ranging from 1-6 kPa. Introducing asymmetry in the neck region, unidirectional valving action was achieved. The passive valving devices were used in combination with two electrodes to implement a sample injector. The injector uses an electrolytically-generated O2 bubble that raises the liquid pressure beyond the barrier thus reestablishing flow with as little as 150 μW of electrical power
Keywords
capillarity; microactuators; semiconductor technology; valves; 1 to 6 kPa; 150 muW; O2; O2 bubble; active injectors; asymmetry; capillary forces; capillary pressure barrier; design; electrolytically-generated bubble; fabrication; horizontal neck regions; liquid pressure; microfabricated capillarity-driven stop valve; passive plastic microfluidic valves; pressure barriers; sample injector; testing; unidirectional valving action; vertical and horizontal neck regions; Chemical engineering; Chemical sensors; Circuit testing; Electrodes; Fabrication; Micromachining; Neck; Plastics; Reservoirs; Valves;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on
Conference_Location
Heidelberg
ISSN
1084-6999
Print_ISBN
0-7803-4412-X
Type
conf
DOI
10.1109/MEMSYS.1998.659727
Filename
659727
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