DocumentCode
3014210
Title
Fabrication of Silicon Inverse Woodpile Photonic Crystals
Author
Hermatschweiler, M. ; Wegener, M. ; Ozin, G.A. ; Ledermann, A. ; von Freymann, G.
Author_Institution
Univ. Karlsruhe (TH), Karlsruhe
fYear
2007
fDate
6-11 May 2007
Firstpage
1
Lastpage
2
Abstract
We fabricate silicon inverse woodpile structures for the first time. Direct laser writing of polymeric templates and a novel silicon-single-inversion procedure lead to structures with gap/midgap ratios of 14.2 % centered at 2.5 mum wavelength.
Keywords
laser materials processing; photonic crystals; silicon; Si; direct laser writing; polymeric templates; silicon inverse woodpile photonic crystals; silicon inverse woodpile structures; silicon-single-inversion procedure; Coatings; Fabrication; Filling; Optical polymers; Optical refraction; Optical scattering; Photonic crystals; Silicon compounds; Temperature; Writing;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location
Baltimore, MD
Print_ISBN
978-1-55752-834-6
Type
conf
DOI
10.1109/CLEO.2007.4453118
Filename
4453118
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