• DocumentCode
    3015773
  • Title

    Scanning tunneling microscopy and spectroscopy studies of self assembled sub 10 nm copper-silicide nanostructures on Si(110)

  • Author

    Poh-Keong Ng ; Fisher, Brent ; Lilley, Carmen M.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Illinois at Chicago, Chicago, IL, USA
  • fYear
    2013
  • fDate
    5-8 Aug. 2013
  • Firstpage
    105
  • Lastpage
    109
  • Abstract
    Self assembled Cu3Si nanoislands and nanowires on Si(110) were fabricated with electron beam evaporation in ultra high vacuum while annealing the substrate at 600°C. Scanning tunneling microscopy technique was used to study the resultant nanostructures of sub 10 nm size. Surface images of a nanoisland and nanowire were obtained. The former showed evidence of single crystalline structures. The length, width, and height dimensions of the nanoisland and nanowire were ~100 nm × 30 nm × 6 nm and 75 nm × 12.5 nm × 3 nm, respectively. Scanning tunneling spectroscopy on both the nanostructures performed to obtain their local density of states. Both nanostructures did not exhibit metallic behavior.
  • Keywords
    annealing; copper compounds; electronic density of states; evaporation; nanofabrication; nanowires; scanning tunnelling microscopy; scanning tunnelling spectroscopy; self-assembly; Cu3Si; Si; Si(110) surface images; electron beam evaporation; local density of states; metallic behavior; nanoisland dimensions; nanoisland length; nanoisland width; scanning tunneling microscopy; scanning tunneling spectroscopy; self assembled copper-silicide nanostructures; self assembled nanoisland fabrication; self assembled nanowire fabrication; single crystalline structures; size 10 nm; substrate annealing; ultra high vacuum medium; Nanowires; Self-assembly; Semiconductor device measurement; Silicides; Silicon; Tunneling; Cu3Si; Self assembly; nanoisland; nanowire and scanning tunneling microscopy (STM);
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on
  • Conference_Location
    Beijing
  • ISSN
    1944-9399
  • Print_ISBN
    978-1-4799-0675-8
  • Type

    conf

  • DOI
    10.1109/NANO.2013.6720872
  • Filename
    6720872