DocumentCode
3017072
Title
High-repetition-rate pulsed operation of a wire ion plasma source
Author
Urai, H. ; Kurosawa, T. ; Okino, A. ; Hotta, E. ; Kwang-Choel Ko
Author_Institution
Dept. of Energy Sci., Tokyo Inst. of Technol., Yokohama, Japan
fYear
1996
fDate
3-5 June 1996
Firstpage
222
Abstract
Summary form only given. The wire ion plasma source (WIPS) has the potential as a high-density-plasma source and a large-cross sectional ion source that can be used for the secondary emission electron gun. The secondary emission electron gun of this type usually operates under the pulse mode and is suitable for high repetition rate operations. The WIPS is a cold-cathode gaseous discharge device based on the low-pressure wire discharge. The anode is a thin tungsten wire (/spl phi/0.2 mm). The cathode consists of a stainless steel cylinder (40 mm i.d., 100 mm long) which is set coaxially to the wire anode and the plates having central apertures (/spl phi/20 mm) at both ends. This configuration produces not only a radial logarithmic trapping potential but also an axial one for electrons, and permits low-pressure (/spl sim/10/sup -2/ Torr in helium) gaseous discharge to occur with very low applied voltage (/spl sim/1 kV). Pulsed discharges were accomplished by firing a capacitor bank of 24 nF. The charging voltages of the capacitor bank. were 3/spl sim/10 kV. The voltages were usually fed to the anode wire through a thyratron switch which has a short life time. So we developed a new method of initiating the pulsed discharge, which is accomplished by controlling the axial trapping of electrons.
Keywords
plasma production; anode wire; capacitor bank; cold-cathode gaseous discharge device; electron axial trapping; electrons; gaseous discharge; high-density-plasma source; high-repetition-rate pulsed operation; large-cross sectional ion source; pulsed discharge; pulsed discharges; radial logarithmic trapping potential; secondary emission electron gun; stainless steel cylinder cathode; thin W wire anode; thyratron switch; wire ion plasma source; Anodes; Capacitors; Electron emission; Electron traps; Fault location; Ion sources; Plasma sources; Switches; Voltage; Wire;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1996. IEEE Conference Record - Abstracts., 1996 IEEE International Conference on
Conference_Location
Boston, MA, USA
ISSN
0730-9244
Print_ISBN
0-7803-3322-5
Type
conf
DOI
10.1109/PLASMA.1996.550943
Filename
550943
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