3D finite element modeling of real size SAW devices and experimental validation

We report on several successful examples of using finite elements based software package for modeling SAW structures with dimensions above 100 wavelengths in the propagation direction including all the electrodes and spaces. The approach easily incorporates additional layers and elements with arbitrary 3D shapes that are common in SAW devices. Temperature behavior of the frequency response, SAW beam shape, bulk wave related data and other relevant information is stored in the solution and this helps determining the sources of response peculiarities. The modeling results for infinite periodic structures are validated against the proven FEMSDA software. Personal workstation is used for modeling. This work demonstrates the capabilities of finite elements based software running on contemporary personal computers to solve practical problems of SAW device design.