New micro stereo lithography for freely movable 3D micro structure-super IH process with submicron resolution

Author

Ikuta, Koji ; Maruo, Shoji ; Kojima, Syunsuke

Author_Institution

Dept. of Micro Syst. Eng., Nagoya Univ., Japan

fYear

1998

fDate

25-29 Jan 1998

Firstpage

290

Lastpage

295

Abstract

We have developed a drastically advanced micro stereo lithography named “Super IH process”. It is the most unique feature of this process that liquid UV (Ultra Violet) polymer can be solidified at a pinpoint position in 3D space by optimizing apparatus and focusing condition of the laser beam. This pinpoint exposure enables us to make real 3D micro structure without any support parts nor sacrificial layers. Therefore freely movable micro mechanism such as gear rotators and free connected chains can be made easily. Moreover, several problems which conventional micro stereo lithography has are completely solved. Submicron fabrication resolution has first achieved by simple desk top apparatus. Since total fabrication time of the super IH process is extremely fast, it is easy to apply to mass productive 3D micro fabrication process

Keywords

laser beam machining; micromechanical devices; optical focusing; photolithography; polymer films; solidification; 3D micro fabrication; IH process; freely movable 3D microstructure; micro mechanism; micro stereo lithography; pinpoint position; real 3D micro structure; submicron fabrication; submicron resolution; Lithography; Optical arrays; Optical device fabrication; Optical fibers; Polymers; Silicon; Solid lasers; Surface tension; Systems engineering and theory; Viscosity;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on

Conference_Location

Heidelberg

ISSN

1084-6999

Print_ISBN

0-7803-4412-X

Type

conf

DOI

10.1109/MEMSYS.1998.659770

Filename

659770