A rod-shaped vibro touch sensor using PZT thin film

Author

Kanda, Takefumi ; Morita, Takeshi ; Kurosawa, Minoru ; Higuchi, Toshiro

Author_Institution

Dept. of Precision Machinery Eng., Tokyo Univ., Japan

fYear

1998

fDate

25-29 Jan 1998

Firstpage

378

Lastpage

383

Abstract

We have fabricated a probe sensor. This sensor is for high-precision coordinate measuring machines, surface roughness measuring tools, or scanning probe microscopes (SPM). This sensor consists of a rod vibrating in the axial direction. The longitudinal vibration was excited and also detected by PZT thin film. The PZT thin film was fabricated by a hydrothermal method. The hydrothermal method uses the reaction process in hot and high pressure aqueous solutions. We made 27.8 mm long sensor. Its resonance frequency was 116 kHz. The sensitivity and resolution were evaluated by experiments. We succeeded in oscillating the rod and detecting the contact

Keywords

lead compounds; micromechanical resonators; microsensors; piezoelectric thin films; piezoelectric transducers; scanning probe microscopy; surface topography measurement; 116 kHz; 27.8 mm; PZT; PZT thin film; PbZrO3TiO3; high pressure aqueous solutions; high-precision coordinate measuring machines; hydrothermal; longitudinal vibration; probe sensor; resolution; resonance frequency; rod-shaped vibro touch sensor; scanning probe microscopes; sensitivity; surface roughness measuring tools; Damping; Piezoelectric films; Probes; Resonance; Resonant frequency; Tactile sensors; Thin film sensors; Transistors; Vibration measurement; Viscosity;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on

Conference_Location

Heidelberg

ISSN

1084-6999

Print_ISBN

0-7803-4412-X

Type

conf

DOI

10.1109/MEMSYS.1998.659786

Filename

659786