DocumentCode
3026249
Title
Development and application of in-house high voltage power supply for atmospheric pressure plasma treatment system
Author
Nayan, Nafarizal ; Zahariman, M.R. ; Ahmad, M.F.B. ; Ali, R.A.M. ; Sahdan, Mohd Zainizan ; Hashim, U.
Author_Institution
Microelectron. & Nanoelectronic - Shamsuddin Res. Centre (MiNT-SRC), Univ. Tun Hussein Onn Malaysia, Parit Raja, Malaysia
fYear
2012
fDate
19-21 Sept. 2012
Firstpage
596
Lastpage
599
Abstract
Atmospheric pressure plasma is now being widely developed for simple surface treatment process and for fast medical tools sterilization. Plasma surface modification involves the interaction of the plasma generated excited species with a solid interface or coatings. The previous vacuum plasma system is not applicable and very costly. In the present project, we have developed the high voltage power supply and atmospheric pressure plasma using dielectric barrier discharge concept. The high voltage power supply was developed using a simple 555 timer and car´s ignition coil. Then, we investigate the plasma surface modification effect from the contact angle measurement and evaluate the roughness using surface profiler. We found that the contact angle decreased with the exposure time and surface roughness changed when exposed with atmospheric pressure plasma. It has been understood that a film coating will be create on glass and silicon surface when expose with atmospheric pressure plasma system in water vapor environment.
Keywords
angular measurement; atmospheric pressure; contact angle; plasma applications; 555 timer; atmospheric pressure plasma treatment system; car ignition coil; contact angle measurement; dielectric barrier discharge concept; fast medical tools sterilization; film coating; glass surface; in-house high voltage power supply; plasma surface modification effect; silicon surface; solid coatings; solid interface; surface profiler; surface roughness; surface treatment process; time roughness; water vapor environment; Glass; Plasmas; Rough surfaces; Substrates; Surface discharges; Surface roughness; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Electronics (ICSE), 2012 10th IEEE International Conference on
Conference_Location
Kuala Lumpur
Print_ISBN
978-1-4673-2395-6
Electronic_ISBN
978-1-4673-2394-9
Type
conf
DOI
10.1109/SMElec.2012.6417216
Filename
6417216
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