DocumentCode
3026789
Title
Refractive Gauss-to-Tophat Beam Shapers Improve Structure Quality and Speed in Micro-machining
Author
Homburg, Oliver ; Toennissen, Frank ; Ganser, Heiko ; Mitra, Thomas ; Lissotschenko, Vitalij
Author_Institution
LIMO-Lissotschenko Mikrooptik GmbH, Dortmund
fYear
2007
fDate
6-11 May 2007
Firstpage
1
Lastpage
1
Abstract
The transformation principle of a Gaussian beam into a homogeneous top-hat profile by means of free-form refractive micro-optics is reviewed. Various flat-top profiles achieved with different laser sources as well as micro-machining results are demonstrated.
Keywords
laser beam machining; micro-optics; micromachining; flat-top profiles; free-form refractive micro-optics; laser sources; micromachining; refractive Gauss-to-Tophat beam shapers; speed improvement; structure quality; Gaussian processes; Laser beams; Laser modes; Optical design; Optical device fabrication; Optical devices; Optical refraction; Power lasers; Production; Resists;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location
Baltimore, MD
Print_ISBN
978-1-55752-834-6
Type
conf
DOI
10.1109/CLEO.2007.4453726
Filename
4453726
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