• DocumentCode
    3039911
  • Title

    Effect of gate structures on ESD characteristics in SOI MOS device

  • Author

    Yujuan He ; Hongwei Luo ; Qingzhong Xiao

  • Author_Institution
    Sci. & Technol. on Reliability Phys. & Applic. of Electr. Component Lab., Guangzhou, China
  • fYear
    2013
  • fDate
    15-19 July 2013
  • Firstpage
    745
  • Lastpage
    748
  • Abstract
    The ESD characteristic of SOI NMOSFET with different gate structures was studied. It was indicated that the ESD robustness ability was the strongest in gate around source (GAS) structure and was the weakest in enclosed gate structure in SOI NMOSFET. This was probably related to interested areas and current density.
  • Keywords
    MOSFET; current density; electrostatic discharge; silicon-on-insulator; ESD characteristics; ESD robustness ability; GAS structure; SOI MOS device; SOI NMOSFET; Si; current density; gate around source structure; Electrostatic discharges; Heating; Indexes; Logic gates; MOSFET circuits; RNA; Reliability; ESD protection; GGNMOS; SOI; TLP test;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physical and Failure Analysis of Integrated Circuits (IPFA), 2013 20th IEEE International Symposium on the
  • Conference_Location
    Suzhou
  • ISSN
    1946-1542
  • Print_ISBN
    978-1-4799-1241-4
  • Type

    conf

  • DOI
    10.1109/IPFA.2013.6599268
  • Filename
    6599268