Young´s modulus measurement of thin film PZT

Author

Zhou, Jia ; McMcollough, Trevor ; Mantell, Susan C. ; Zurn, Shayne

Author_Institution

Dept. of Mech. Eng., Minnesota Univ., Minneapolis, MN, USA

fYear

1999

fDate

1999

Firstpage

153

Lastpage

157

Abstract

In this paper, experimental measurements of the modulus for thin film PZT are presented. Several wafers with PZT patterned over Pt/Ti/SiO ₂ were fabricated. In each wafer, circular membranes of diameters ranging from 668 μm to 1667 μm were constructed using reactive ion etching. Film moduli for the various material layers were found by measuring membrane deflection under a concentrated load. Layer thickness was verified using SEM. To account for the initial curvature in the membrane, the relationship between load, deflection and stiffness was approximated by a spherical shell model. These stiffness values provided the basis for predicting micro cantilever beam vibration behavior

Keywords

Young´s modulus; elastic moduli measurement; ferroelectric thin films; lead compounds; scanning electron microscopy; PZT; PbZrO3TiO3; Pt-Ti-SiO₂; SEM; Young´s modulus; circular membranes; layer thickness; membrane deflection; micro cantilever beam vibration; reactive ion etching; spherical shell model; thin film; Biomembranes; Equations; Etching; Mechanical engineering; Micromechanical devices; Piezoelectric films; Semiconductor device modeling; Silicon; Transistors; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

University/Government/Industry Microelectronics Symposium, 1999. Proceedings of the Thirteenth Biennial

Conference_Location

Minneapolis, MN

Print_ISBN

0-7803-5240-8

Type

conf

DOI

10.1109/UGIM.1999.782843

Filename

782843