LTCC membranes With integrated heating structures, temperature sensors and strain gauges

Author

Gutzeit, Nam ; Müller, Jens ; Reinlein, Claudia ; Gebhardt, Sylvia

Author_Institution

Inst. of Micro- & Nanotechnol., Ilmenau Univ. of Technol., Ilmenau, Germany

fYear

2012

fDate

9-13 May 2012

Firstpage

399

Lastpage

405

Abstract

In this paper the challenging manufacturing process of a deformable mirror for the wave front correction of a high energy laser is described. During this process the LTCC membrane as the base component with integrated sensors must endure several postfire processes at temperatures of up to 900°C without any degradation of the sensors´ characteristics. In order to optimize the sensors, various combinations of resistor and conductor pastes and different geometries are characterized. The usability and the performance of the sensor elements after temperature treatment are investigated by measuring the resistance and its resistance temperature characteristic.

Keywords

ceramic packaging; conductors (electric); electric resistance measurement; laser mirrors; manufacturing processes; membranes; resistors; strain gauges; temperature measurement; temperature sensors; LTCC membrane; conductor paste; deformable mirror; geometry; high energy laser; integrated heating structure; integrated sensor; manufacturing process; postfire processing; resistance measurement; resistance temperature characteristic; resistor; strain gauge; temperature sensor; temperature treatment; wave front correction; Conductivity; Geometry; Heating; Mirrors; Resistance; Temperature measurement; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics Technology (ISSE), 2012 35th International Spring Seminar on

Conference_Location

Bad Aussee

ISSN

2161-2528

Print_ISBN

978-1-4673-2241-6

Electronic_ISBN

2161-2528

Type

conf

DOI

10.1109/ISSE.2012.6273169

Filename

6273169