• DocumentCode
    3042169
  • Title

    3D Magnetic Microactuator Made of Newly Developed Magnetically Modified Photocurable Polymer and Application to Swimming Micromachine and Microscrewpump

  • Author

    Kobayashi, Kengo ; Ikuta, Koji

  • Author_Institution
    Dept. of Micro-Nano Syst. Eng., Nagoya Univ., Nagoya
  • fYear
    2009
  • fDate
    25-29 Jan. 2009
  • Firstpage
    11
  • Lastpage
    14
  • Abstract
    This paper describes a newly developed photocurable polymer with ferromagnetic property for microstereolithography to fabricate magnetic microactuators with three dimensional (3D) structures and its application to a wirelessly controllable swimming micromachine and microscrewpump. This polymer was prepared by mixing a photocurable polymer with magnetic particles, together a viscosity-increasing agent to maintain the particle dispersion. It was demonstrated that this polymer were rapidly fabricated into various complicated 3D magnetic microstructures using microstereolithography. Finally, a swimming micromachine and microscrewpump driven by magnetic force wirelessly were developed using screw-type microactuators made of the polymer with a diameter of submillimeter order.
  • Keywords
    electromagnetic actuators; ferromagnetism; microactuators; polymers; stereolithography; 3D magnetic microactuator; ferromagnetic property; magnetic particles; magnetically modified photocurable polymer; microstereolithography; particle dispersion; screw-type microactuators; swimming micromachine; swimming microscrewpump; viscosity-increasing agent; Magnetic forces; Magnetic liquids; Magnetic materials; Magnetic particles; Magnetic properties; Microactuators; Micromagnetics; Microstructure; Photonic crystals; Polymers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
  • Conference_Location
    Sorrento
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-2977-6
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2009.4805306
  • Filename
    4805306