A Wafer-Level Micro Mechanical Global Shutter for a Micro Camera

A novel wafer-level manufactured micro mechanical global shutter utilizing thin-film roll actuators is presented for a micro mobile camera. The aperture of the shutter is 2.2 mm in diameter and covered with 36 triangular roll actuators whose radius of curvature is designed to 235 mum. The stress induced rolling of thin composite layers and their pull-in behaviors are analyzed and experimented. A 0.8 mm-thick wafer-level shutter array is successfully implemented using batch processes. The fabricated shutter can follows 500 Hz-square wave signal of 30 V.