DocumentCode
3044831
Title
Surface-Temperature Control of Silicon Nanowires in Dry and Liquid Conditions
Author
Akiyama, Soramichi ; Cheng, Y.T. ; Fattaccioli, J. ; Takama, N. ; Löw, P. ; Bergaud, C. ; Kim, B.J.
Author_Institution
Inst. of Ind. Sci., Univ. of Tokyo, Tokyo
fYear
2009
fDate
25-29 Jan. 2009
Firstpage
567
Lastpage
570
Abstract
In this paper we present the results of surface temperature control of silicon nanowires by using fluorescent thermometry at the nanometer scale. Rhodamine B is one of the stable fluorescent molecules, which rely on the characteristic of temperature-dependent change in fluorescent intensity, and it was used for nano-scale surface temperature sensing interface. The resistive heating on Si nanowires was carried out with applying voltage potential of 6~12 V. Surface-temperature measurement was performed by converting the changes in fluorescent intensity with calibration curve of Rhodamine B. The temperature at the central line along nanowires increasing from 30 degrees to 35~70 degrees was observed.
Keywords
elemental semiconductors; fluorescence; nanosensors; nanowires; silicon; temperature control; temperature measurement; temperature sensors; thermometers; Rhodamine B; Si; calibration curve; fluorescent molecules; fluorescent thermometry; nano-scale surface temperature sensing interface; resistive heating; silicon nanowires; surface temperature control; temperature 30 degC; temperature 35 degC to 70 degC; voltage 6 V to 12 V; Anisotropic magnetoresistance; Fluorescence; Heating; Industrial control; Nanowires; Probes; Silicon; Temperature control; Temperature measurement; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location
Sorrento
ISSN
1084-6999
Print_ISBN
978-1-4244-2977-6
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2009.4805445
Filename
4805445
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