Electron Beam Stimulated Oxidation of Carbon (EBSOC)

Author

Spinney, P.S. ; Collins, S.D. ; Smith, R.L.

Author_Institution

Micro Instrum. & Syst. Lab., Univ. of Maine, Orono, ME

fYear

2009

fDate

25-29 Jan. 2009

Firstpage

571

Lastpage

574

Abstract

The patterning of carbon nanostructures by electron beam stimulated oxidation is described. Sputter deposited carbon thin films and carbon nanotubes are locally oxidized in a scanning electron microscope using injected water vapor. The resulting structures are examined with scanning electron microscopy (SEM) and transmission electron microscopy (TEM). Electrical resistance obtained post-processing is comparable to as-deposited values. Etched linewidths on the order of 20 nm are demonstrated along with sub-2 nm wide carbon wires.

Keywords

electrical resistivity; electron beam deposition; nanopatterning; nanostructured materials; oxidation; sputter deposition; thin films; transmission electron microscopy; C; TEM; carbon nanostructure patterning; carbon wires; electrical resistance; electron beam stimulated oxidation; injected water vapor; scanning electron microscope; sputter deposited carbon thin films; transmission electron microscopy; Carbon nanotubes; Electron beams; Etching; Nanobioscience; Nanoscale devices; Oxidation; Scanning electron microscopy; Substrates; Transmission electron microscopy; Wires;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on

Conference_Location

Sorrento

ISSN

1084-6999

Print_ISBN

978-1-4244-2977-6

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2009.4805446

Filename

4805446