Design and fabrication of configurable digital controller interface for micro mirror projector ASIC

Author

Luo, Jianwen ; Li, Peng ; Pang, Chin Yann ; Gopalakrishnan, Pradeep Kumar ; Langer, Tal ; Je, Minkyu

Author_Institution

Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore

fYear

2011

fDate

12-14 Dec. 2011

Firstpage

392

Lastpage

395

Abstract

This paper presents the design and implementation of digital interface for micro mirror projection ASIC for MEMS scanner control and sensing. The design includes a microprocessor for sensor configuration, MEMS control registers access and video interface for providing scanning and synchronizing signals. It has been fabricated on 0.18μm high voltage CMOS process, and silicon proves the full functionality of the design concept.

Keywords

CMOS digital integrated circuits; application specific integrated circuits; digital control; display devices; microcontrollers; microfabrication; micromirrors; microsensors; MEMS control registers; MEMS scanner control; MEMS sensing; configurable digital controller interface design; configurable digital controller interface fabrication; micromirror projector ASIC; size 0.18 mum; video interface; voltage CMOS process; Micromechanical devices; Mirrors; Nonvolatile memory; Random access memory; Registers; Streaming media; Synchronization;

fLanguage

English

Publisher

ieee

Conference_Titel

Integrated Circuits (ISIC), 2011 13th International Symposium on

Conference_Location

Singapore

Print_ISBN

978-1-61284-863-1

Type

conf

DOI

10.1109/ISICir.2011.6131979

Filename

6131979