Fully Differential Internal Electrostatic Transduction of a Lamé-Mode Resonator

This paper reports the parallel internal electrostatic transduction of a laterally driven Lame-mode polysilicon resonator. This resonator is fabricated using a manufacturable double nanogap process that provides ultrathin high-aspect ratio lateral gaps. The transduction electrodes are optimally placed and oriented to maximize electromechanical transduction efficiency for the fundamental Lame mode. A 128.15 MHz Lame-mode resonator is driven and sensed differentially with a 20 V DC polarization voltage: the motional resistance is about 30 kOmega and the quality factor Q > 12000 in air.