• DocumentCode
    3049462
  • Title

    The complex mechanisms of Ion Beam Induced Deposition

  • Author

    Chen, Ping ; Alkemade, Paul F A ; Salemink, Huub W.M.

  • Author_Institution
    Delft Univ. of Technol., Delft
  • fYear
    2007
  • fDate
    5-8 Nov. 2007
  • Firstpage
    260
  • Lastpage
    261
  • Abstract
    In this paper, Ion Beam Induced Deposition (IBID) mechanisms for nanostructure growth are investigated in terms of the contribution of secondary atoms, secondary electrons, and primary ions.
  • Keywords
    ion beam assisted deposition; nanotechnology; ion beam induced deposition; nanostructure growth; primary ions; secondary atoms; secondary electrons; Atomic layer deposition; Atomic measurements; Electron beams; Ion beams; Milling; Nanostructures; Scanning electron microscopy; Shape; Sputtering; Switches;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology, 2007 Digest of papers
  • Conference_Location
    Kyoto
  • Print_ISBN
    978-4-9902472-4-9
  • Type

    conf

  • DOI
    10.1109/IMNC.2007.4456203
  • Filename
    4456203
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3049462