DocumentCode
3049468
Title
Evaluation of Resolution for Free-Space-Wiring Fabricated by FIB-CVD
Author
Minari, C. ; Kometani, R. ; Nakamatsu, K. ; Kanda, K. ; Haruyama, Y. ; Kaito, T. ; Matsui, S.
Author_Institution
Hyogo Univ., Hyogo
fYear
2007
fDate
5-8 Nov. 2007
Firstpage
262
Lastpage
263
Abstract
Focused ion beam chemical vapor deposition is used to fabricate diamond like carbon (DLC) nanostructures on silicon substrate using phenanthrene gas source at an acceleration voltage of 30 kV. Observations show decreasing DLC linewidth with increasing ion beam scan speed. This is attributed to the Gaussian profile of Ga+ ion beam.
Keywords
chemical vapour deposition; diamond-like carbon; focused ion beam technology; ion beam effects; nanostructured materials; C; DLC; FIB-CVD; Gaussian profile; Si; diamond like carbon nanostructures; focused ion beam chemical vapor deposition; free-space wiring; phenanthrene gas source; silicon substrate; voltage 30 kV; Acceleration; Chemical technology; Diamond-like carbon; Ion beams; Nanotechnology; Optical device fabrication; Optical devices; Tail; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location
Kyoto
Print_ISBN
978-4-9902472-4-9
Type
conf
DOI
10.1109/IMNC.2007.4456204
Filename
4456204
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