DocumentCode
3050192
Title
Preparation and properties of a high temperature, flexible and colorless ITO coated polyimide substrate
Author
Li, Tung-Lin ; Hsu, Steve Lien-Chung
Author_Institution
Nat. Cheng-Kung Univ., Tainan
fYear
2007
fDate
5-8 Nov. 2007
Firstpage
354
Lastpage
355
Abstract
By choosing appropriate monomers, we were able to synthesize a high temperature and colorless polyimide film. The ITO films were deposited on the polyimide film by the magnetron-sputtering process to form flexible ITO coated plastic substrates. Due to the high glass transition temperature (Tg) of the polyimide, the ITO film can be annealed at a temperature up to 250degC to improve its electro-optical properties.
Keywords
annealing; electro-optical effects; glass transition; indium compounds; polymer films; sputter deposition; ITO; ITO coating; annealing; electro-optical properties; glass transition temperature; magnetron sputtering; plastic substrates; polyimide film; polyimide substrate; temperature 250 degC; Annealing; Conductivity; Electric resistance; Glass; Indium tin oxide; Optical films; Plastic films; Polyimides; Substrates; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location
Kyoto
Print_ISBN
978-4-9902472-4-9
Type
conf
DOI
10.1109/IMNC.2007.4456250
Filename
4456250
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