DocumentCode
3050400
Title
Low Frequency Noise Measurement and Analysis of Capacitive Micro-Accelerometers: Temperature Effect
Author
Mohd-Yasin, Faisal ; Nagel, D.J. ; Ong, D.S. ; Korman, C.E. ; Chuah, H.T.
Author_Institution
Multimedia Univ., Cyberjaya
fYear
2007
fDate
5-8 Nov. 2007
Firstpage
376
Lastpage
377
Abstract
In this work, a noise measurement of capacitive micro-accelerometers incorporating temperature effect is presented. In the setup, a hot plate is used to heat the device up to temperatures in the 75 degree C range. A thermo couple attached to the enclosure is used to assess its temperature. The data show that the noise power increases at high temperature, but not as significant as predicted by the theory.
Keywords
accelerometers; capacitive sensors; electric noise measurement; microsensors; MEMS; accelerometers; capacitive microaccelerometers; low frequency noise measurement; temperature 75 degC; temperature effect; thermocouple; Acceleration; Accelerometers; Circuit noise; Frequency measurement; Low-frequency noise; Micromechanical devices; Noise figure; Noise measurement; Sensor phenomena and characterization; Temperature; acceleration-dependent; accelerometers; noise; temperature-dependence;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location
Kyoto
Print_ISBN
978-4-9902472-4-9
Type
conf
DOI
10.1109/IMNC.2007.4456261
Filename
4456261
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