A generic monolithically integrated micromechanic optic sensor (MIMOS)

Author

Tran, A.T.T.D. ; Lee, J.J. ; Zhang, K. ; Lo, Y.H.

Author_Institution

Cornell Univ., Ithaca, NY, USA

Volume

1

fYear

1996

fDate

18-21 Nov. 1996

Firstpage

63

Abstract

This paper addresses an innovative optical scheme to detect ultrafine motions of micromechanical structures, as a generic design for a whole class of sensors including accelerometers, gyroscopes, position sensors, etc.. We fabricated a monolithically integrated micromechanic optic sensor (MIMOS) on a Si substrate. The device consists of two superimposing gratings with a small angle and an array of photodetectors.

Keywords

accelerometers; diffraction gratings; gyroscopes; integrated optoelectronics; microsensors; moire fringes; optical fabrication; photodetectors; sensitivity; silicon; substrates; Si substrate; accelerometers; generic design; generic monolithically integrated micromechanic optic sensor; gyroscopes; innovative optical scheme; micromechanical structures; monolithically integrated micromechanic optic sensor fabrication; photodetector array; position sensors; small angle; superimposing gratings; ultrafine motion detection; Accelerometers; Gratings; Gyroscopes; Integrated optics; MIMO; Micromechanical devices; Motion detection; Optical design; Optical detectors; Optical sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society Annual Meeting, 1996. LEOS 96., IEEE

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-3160-5

Type

conf

DOI

10.1109/LEOS.1996.565124

Filename

565124