DocumentCode
3054320
Title
High reliable Al-Si alloy/Si contacts by rapid thermal sintering
Author
Uemura, E. ; Onoda, Hiroshi ; Madokoro, S.
Author_Institution
Oki Electric Industry Co., Ltd.
fYear
1988
fDate
12-14 Apr 1988
Firstpage
39
Lastpage
39
Keywords
Contact resistance; Electrical resistance measurement; Furnaces; Heat treatment; Metallization; Rapid thermal annealing; Rapid thermal processing; Research and development; Silicon alloys; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium 1988. 26th Annual Proceedings., International
Type
conf
DOI
10.1109/RELPHY.1988.917817
Filename
917817
Link To Document