Nine-Element Lumped Metal-Insulator-Metal (MIM) Capacitor Model for RF Applications

Author

Subramaniam, Kalavathi ; Kordesch, Albert Victor ; Esa, Mazlina

Author_Institution

Univ. of Technol., Skudai

fYear

2007

fDate

8-10 Nov. 2007

Firstpage

425

Lastpage

430

Abstract

In this paper we suggest using a nine element model to represent metal-insulator-metal (MIM) capacitors up to 20 GHz. The model suggested is a nine element pi circuit that includes interconnect resistance and inductance as well as substrate parasitics. This paper also identifies the procedures to extract the nine element lumped MIM capacitor model and to optimize the model to fit the measured data up to the self resonant frequency. A good fit between the modeled and measured effective capacitance and Q factor have been obtained in this work.

Keywords

MIM devices; Q-factor; capacitors; Q factor; RF applications; effective capacitance; interconnect inductance; interconnect resistance; nine element pi circuit; nine-element lumped metal-insulator-metal capacitor model; substrate parasitics; Data mining; Electrical resistance measurement; Frequency measurement; Inductance; Integrated circuit interconnections; MIM capacitors; Metal-insulator structures; Radio frequency; Radiofrequency identification; Resonant frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics Manufacturing and Technology, 31st International Conference on

Conference_Location

Petaling Jaya

ISSN

1089-8190

Print_ISBN

978-1-4244-0730-9

Electronic_ISBN

1089-8190

Type

conf

DOI

10.1109/IEMT.2006.4456489

Filename

4456489