• DocumentCode
    3054997
  • Title

    Effects of fluid media on ultra-thin SOI based pH sensors

  • Author

    Fernandes, P.G. ; Seitz, O. ; Chapman, R.A. ; Stiegler, H.J. ; Wen, H.-C. ; Chabal, Y.J. ; Vogel, E.M.

  • Author_Institution
    Dept. of Electr. Eng., Univ. of Texas at Dallas, Dallas, TX, USA
  • fYear
    2009
  • fDate
    9-11 Dec. 2009
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    In this work, we explore other important factors including ionic response to applied voltages, salt contamination of oxides, bias dependence of signal drift and hysteresis in the presence of fluid.
  • Keywords
    chemical sensors; pH measurement; silicon-on-insulator; applied voltages; bias dependence; fluid media; hysteresis; ionic response; pH sensors; salt contamination; signal drift; ultra-thin SOI; Educational institutions; FETs; Gold; Hysteresis; Instruments; Materials science and technology; Microfluidics; Semiconductor device measurement; Silicon; Solvents;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Device Research Symposium, 2009. ISDRS '09. International
  • Conference_Location
    College Park, MD
  • Print_ISBN
    978-1-4244-6030-4
  • Electronic_ISBN
    978-1-4244-6031-1
  • Type

    conf

  • DOI
    10.1109/ISDRS.2009.5378055
  • Filename
    5378055
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3054997