Differential capacitive accelerometer fabricated with PolyMUMP´s technology: Design and characterization

In this work the design, analysis and characterization of a capacitive accelerometer fabricated with low-cost PolyMUMP´s technology for automotive applications were presented. The simulations of the accelerometer design using the coventorware software, indicated that for capacitive sensing, an electronic readout system requires detection of low capacitance reading resolutions (down to aF). With the analysis and experimental characterization the operation parameters of the accelerometer were obtained such as: sensitivity, nonlinearity, hysteresis and the radiometric parameter (see fig 2-5). The obtained results showed a value of sensitivity of 1.4 mV/g and the non-linearity that the device presented to a maximum deviation of the curve of sensitivity was better than 0.8%, these results are compared with data reported in literature.