DocumentCode
3063625
Title
Fabrication and application of structured nanofiber on chip
Author
Yamamoto, Koji ; Yokoyama, Shiyoshi ; Otomo, Akira
Author_Institution
Inst. for Mater. Chem. & Eng. (IMCE), Kyushu Univ., Kasuga, Japan
fYear
2013
fDate
June 30 2013-July 4 2013
Firstpage
1
Lastpage
2
Abstract
We proposed the fabrication method of nanofibers on Si substrate using FIB milling and selective wet etching for integrated optical applications. The diameter of nanofiber could be well-controlled from 2 μm to 300 nm.
Keywords
etching; focused ion beam technology; integrated optoelectronics; milling; nanofibres; nanophotonics; optical fibre fabrication; FIB milling; Si; Si substrate; chip; fabrication method; integrated optical applications; nanofiber diameter; selective wet etching; structured nanofiber; Fabrication; Milling; Optical fiber sensors; Optical fibers; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location
Kyoto
Type
conf
DOI
10.1109/CLEOPR.2013.6600413
Filename
6600413
Link To Document