• DocumentCode
    3064291
  • Title

    Permanent tuning of high-Q silicon microring resonators by Fs laser surface modification

  • Author

    Bachman, D. ; Chen, Zhe ; Fedosejevs, Robert ; Tsui, Y.Y. ; Van, V.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Alberta, Edmonton, AB, Canada
  • fYear
    2013
  • fDate
    June 30 2013-July 4 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Post-fabrication tuning of silicon microring resonators is accomplished using single fs laser pulses at 400nm with a tuning rate of 20nm/J·cm-2. The resonance mismatch of a 2nd-order microring filter is also corrected.
  • Keywords
    elemental semiconductors; high-speed optical techniques; micro-optics; optical filters; optical resonators; optical tuning; silicon; 2nd-order microring filter; Si; fs laser surface modification; high-Q silicon microring resonators; permanent tuning; post-fabrication tuning; resonance mismatch; single fs laser pulses; wavelength 400 nm; Indexes; Laser tuning; Resonator filters; Silicon; Surface waves; Waveguide lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
  • Conference_Location
    Kyoto
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2013.6600446
  • Filename
    6600446
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3064291