DocumentCode
3066389
Title
Plasma Charging Damage: An Overview
Author
McVittie, J.P.
Author_Institution
Stanford University
fYear
1996
fDate
14-14 May 1996
Firstpage
7
Lastpage
10
Keywords
Degradation; Design for quality; Electrons; Plasma devices; Plasma materials processing; Plasma properties; Plasma temperature; Surface charging; Tunneling; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Process-Induced Damage, 1996 1st International Symposium on
Conference_Location
Santa Clara, CA, USA
Print_ISBN
0-9651577-0-9
Type
conf
DOI
10.1109/PPID.1996.715191
Filename
715191
Link To Document