DocumentCode
3066959
Title
Embedded flash memories-technology assessment and future
Author
Yoshikawa, Kuniyoshi
Author_Institution
Micro & Custom LSI Div., Toshiba Corp., Kawasaki, Japan
fYear
1999
fDate
1999
Firstpage
183
Lastpage
186
Abstract
While embedded flash technologies should be the key for the next decade system-on-a-chip, current aggressive scaling of logic CMOS devices increases the difficulty for the cost effective device realization. Various approaches and requirements for embedded flash devices will be discussed from broad viewpoints, such as device physics, process integration and reliability. Future ideal cell structure will also be addressed
Keywords
cellular arrays; embedded systems; flash memories; integrated circuit reliability; memory architecture; aggressive scaling; cost effective device realization; device physics; embedded flash memories; ideal cell structure; process integration; reliability; system-on-a-chip; technology assessment; CMOS logic circuits; CMOS technology; Costs; Error correction codes; Flash memory; Logic devices; Random access memory; Roads; System-on-a-chip; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, Systems, and Applications, 1999. International Symposium on
Conference_Location
Taipei
ISSN
1524-766X
Print_ISBN
0-7803-5620-9
Type
conf
DOI
10.1109/VTSA.1999.786030
Filename
786030
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