DocumentCode
3072278
Title
Investigation of metal evaporation and film deposition with a high voltage glow-discharge electron gun under middle vacuum
Author
Melnyk, I.V. ; Melnyk, V.I. ; Porytskyy, P.V.
Author_Institution
National Technical University of Ukraine, Kyiv Polytechnic Institute, Faculty of Electronic, Electronic Devices Dept., Pr. Peremogy, 37, Kyiv 03056, Ukraine
Volume
2
fYear
2004
fDate
Sept. 27 2004-Oct. 1 2004
Firstpage
575
Lastpage
578
Abstract
The method of deposition of metals oxide and nitride coatings with using of glow discharge electron guns is discussed. Scheme of technological equipment to realising this process is represented and assignment of its major details is described. Technological parameters of elaborated equipment is pointed out. Mathematical model of realised technological process is proposed and obtained results of simulation is discussed and verified with experimental measurements.
Keywords
Ceramics; Chemicals; Coatings; Electron beams; Electron guns; Gases; Glow discharges; Nuclear electronics; Surface discharges; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Discharges and Electrical Insulation in Vacuum, 2004. Proceedings. ISDEIV. XXIst International Symposium on
Conference_Location
Yalta, Crimea
ISSN
1093-2941
Print_ISBN
0-7803-8461-X
Type
conf
DOI
10.1109/DEIV.2004.1422681
Filename
1422681
Link To Document